Xanadu, a global leader in photonic quantum computing, and Mitsubishi Chemical have announced a joint project aimed at leveraging quantum computing to accelerate the development of next-generation semiconductor chip fabrication technologies. The collaboration focuses on discovering novel quantum algorithms capable of simulating quantum processes in extreme ultraviolet (EUV) lithography—a cutting-edge wafer patterning technique that uses extremely short wavelength light to enable the production of smaller, more powerful microchips.
EUV lithography plays a crucial role in the ongoing miniaturization of integrated circuits, which is foundational to the advancement of technologies such as smartphones, artificial intelligence, and supercomputers. However, as chip features shrink to the nanoscale, quantum effects like Auger decay increasingly impact the lithography process. These complex electron interactions are difficult to simulate using classical computing methods. Quantum computing presents a promising solution by enabling direct simulation of quantum system dynamics and light-matter interactions—capabilities essential for overcoming these challenges.
As part of this initiative, researchers from Mitsubishi Chemical’s Materials Design Laboratory will bring their extensive knowledge of EUV photoresist materials, including insights into molecular structures, chemical compositions, and reactivity. Their contributions will support fundamental understanding and quantitative analysis of key physical phenomena such as EUV absorption, Auger decay, and secondary electron effects. Xanadu’s Quantum Algorithms team will apply its expertise in designing advanced simulation algorithms to model light-matter interactions and secondary electron behavior.
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“Continued progress in chip miniaturization hinges on breakthroughs in EUV lithography and the design of superior photoresist materials. Precisely modeling how these materials interact with EUV light remains a formidable challenge. Using quantum computers to simulate these interactions represents an exciting frontier in tackling this problem, offering a path to uncover material properties for future semiconductor generations.” said Torin Stetina, Senior Quantum Scientist at Xanadu.
“Canada is recognized as a global leader in quantum science and technology, as the result of decades of strategic investment and innovation. In this context, Global Affairs Canada’s Trade Commissioner Service (TCS) in Tokyo is pleased to see the partnership between Xanadu and Mitsubishi Chemical come to fruition.” said Mr. Louis-Pierre Émond, Minister (Commercial), Embassy of Canada to Japan.
This collaboration marks a significant milestone in establishing one of the first practical applications of quantum computing in semiconductor materials research. By developing quantum algorithms that can accurately simulate light-matter interactions relevant to semiconductor lithography, the partnership aligns with Xanadu’s broader mission of making quantum computing practical, accessible, and impactful for industries worldwide.